
MiNY PL – full wafer micro-LED inspection system
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Hamamatsu Photonics has developed a system for high-speed and non-invasive inspection of micro-LEDs on wafers to detect abnormalities in their external appearance, intensity and wavelength of their light emissions. This inspection system utilizes a photoluminescence (PL) measurement technique that is based on our advanced image processing technology and a newly developed imaging module with our unique optical design technology. We call this micro-LED PL inspection system the MiNY PL, type number C15740-01.
This imaging module can simultaneously capture intensity and wavelength of light emitted from micro-LEDs by illuminating them with a stable light source. It allows a rapid acquisition of the photoluminescence over the whole wafer surface. By detecting the intensity and wavelength of the micro-LED emission the system makes quick pass/fail decisions to find abnormalities on the surface and semiconductor level.
The MiNY PL will streamline the 100 percent inspection process of micro-LEDs in future mass production lines.
https://www.hamamatsu.com/eu/en/product/semiconductor-manufacturing-support-systems/micro-led-pl-inspection-system.html
