SparkNano LabLine

SparkNano’s LabLine delivers industry-leading Spatial Atomic Layer Deposition (S-ALD) systems, combining superior film quality with the fastest deposition speeds and unmatched flexibility. These advanced systems are designed to support a wide range of S-ALD processes and accommodate various substrate types, making them the ideal solution for R&D, process development, product development, and even pilot-line production. Furthermore, the SparkNano LabLine systems are fully scalable, bridging the gap between laboratory research and full-scale manufacturing, ensuring a smooth and seamless transition to commercial production. The SparkNano LabLine system is composed of several key components, each designed to deliver maximum performance and flexibility for a variety of spatial ALD applications. These components can be customized or upgraded based on specific process requirements, ensuring the system adapts to your evolving needs.