Intellivation LLC - R2R Platform for Deposition of Active and Passive Thin Films and Patterning for Flexible Electronic Sensors and Devices

High throughput/low-cost manufacturing methods for flexible electronic devices is a key enabler for market adoption. R2R (Roll-to-Roll) sputtered thin films provide rapid product development cycles and manufacturing scalability. Sputtering provides high throughput, high quality thin films of metals, dielectrics, transparent conductors and semiconductors. In conjunction with in-line subtractive patterning techniques, a variety of sensors and circuits can be produced. Laser ablation of thin films and multi-layers provides rapid product development without requiring mask fabrication, lithography, or other costs and labor-intensive steps. A wide variety of materials can be laser ablated or patterned without damage to the underlying substrate surface including flexible glass, polyimide, PEN, PET or other substrates. Laser ablation of multilayers highlights combining these technologies. Deposition and patterning of metallic interconnects and/or semiconducting precursors and their transformation to a semiconducting state by laser annealing allows for manufacturing of fully functional devices.