Oxford Instruments

Oxford Instruments Plasma Technology plays a crucial role in the manufacture of compound semiconductor devices in key markets like quantum, power devices, augmented reality and datacom. We supply conventional plasma etch and deposition, and atomic layer etch and deposition for manufacturing advanced semiconductor devices. Our innovative technology solutions are at the forefront of material engineering and interface optimisation, and are used to produce high yielding, high efficiency and high reliability devices. Our service and product range includes research and development systems right through to fully clusterable, robust and high up-time production systems designed for high-volume manufacturing.